TESCOM 64-3600系列 減壓調(diào)壓閥-艾默生EMERSON
TESCOM 64-3600 Series ultra high purity, highly sensitive pressure reducing regulator offers a low droop, tied diaphragm design, 10 Ra / 0.25 micrometer surface finish with available Hastelloy® trim. Inlet pressures are 600 or 3500 psig / 41.4 or 241 bar with outlet pressure up to 150 psig / 10.3 bar.
Applications
• 1/4" point-of-use
• Gas cabinets
• Semiconductor manufacturing
• Valve manifold boxes
Features and Benefits
• 10 Ra microinch / 0.25 micrometer internal surface finishes
• Metal-to-metal seal (diaphragm to body seal for high leak integrity)
• Full internal electropolish is available
• Designed to reduce pressure fluctuations in semiconductor gas systems
• Meets the stringent semiconductor requirements of both point-of-use and cylinder applications
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