TESCOM 12 Series is a miniature ultra high purity
IGS/VCR pressure reducing regulator. The 12 Series
offers 5 Ra or 10 Ra microinch finishes, tied diaphragm
and internally springless and threadless design. It
provides inlet pressures of 150 psig / 10.3 bar, outlet
pressure from 250 mm Hg-15, 30, 60, 100 psig /
250 mm Hg-1.0, 2.1, 4.1, 6.9 bar with flow rates up to
120 SLPM.
Applications
• OEM Tools
• Gas Boxes
• Low-Pressure Gas Cabinets
Features and Benefits
• Product of choice for state-of-the-art OEM
gas systems
• Ultra-sensitive pressure control enhances
MFC performance
• Superior performance in a wide range
of applications
• Flows from 2 SCFM to 120 SLPM
• Unsurpassed droop and repeatability in a
micro component
• Metal-to-metal diaphragm to body seal for high
leak integrity
• 10 Ra or 5 Ra microinch internal surface finish
• Meets SEMI F19 and SEMI Modular
Interface specifications
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